№3 (34), 2015. TOOL ENGINEERING, METROLOGY AND INFORMATION-MEASURING INSTRUMENTS AND SYSTEMS

Grigoriev S.N., Teleshevsky V.I., Andreev A.G., Ignatyev P.S., Indukaev K.V., Kolner L.S., Osipov P.A.

The metrological certification of laser microscopes based on modulation interferomerty principles with controlled phase shift

The article deals with the basic questions of metrological certification laser microscope MIM with long-stroke XY nanometer accuracy. The basic normalized metrological characteristics of the MIM. The descriptions of test methods for the detection of an error of measurement of linear dimensions structures. We discuss the relevance of MIM microscope to measure the different types of objects.

 

Keywords: modulation interference microscopy, nanometrology, superresolution, nanometer accuracy positioning, aeromagnetic guide, long-throw coordinate table..

[ Back to contents ]
[ Get the article ]