№2 (29), 2014. ТЕХНОЛОГИИ И ОБОРУДОВАНИЕ ДЛЯ МАШИНОСТРОИТЕЛЬНОГО ПРОИЗВОДСТВА

Yu.A. Sysoiev

Principles of creation and device for producing gas mixtures for ion plasma systems

А considered question is gas mixtures creation for production of multicomponent coatings in ion plasma technologies. The developed methods for producing gas mixtures are based on a serial supply of gas component portions into the mixing chamber which providing a predetermined mixture composition with high accuracy. For methods implementation has been developed algorithms and microprocessor control system of created gas mixtures generator. This generator provides training three gases mixture with changeability of each gas percentage in range from 0 to 100 %, with working step of 1 % component content and error isn’t more 0.1 % for each gas.

 

Keywords: gas mixtures, ion plasma technologies, gas mixtures generator, multicomponent coating..

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