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ISSN 2072-3172


Lody M N, Sergeev Y D

On the field of diffraction measurement of objects with small linear dimensions

Considered the issue of measuring small linear dimensions from 5 to 500 micrometers diffraction method.In this paper the diffraction field on the tape using the geometrical theory of diffraction. Shows the ways increase accuracy.


Keywords: diffraction, precision, measurement, control, laser.

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